Shuffle motor: a high force, high precision linear electrostatic stepper motor

摘要

The shuffle motor is a electrostatic stepper motor that employs a mechanical transformation to obtain high forces and small steps. A model has been made to calculate the driving voltage, step size and maximum load to pull as well as the optimal geometry. Tests results are an effective step size of about 85 nm and a maximum produced force of about 40 μN at 40V clamping voltage and 25 V actuator voltage.